Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting / by Xiao-Sheng Zhang
By: Zhang, Xiao-Sheng
Contributor(s): SpringerLink (Online service)
Material type: 
E-bookSeries: Springer Theses, Recognizing Outstanding Ph.D. ResearchPublisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2016Edition: 1st ed.Description: 1 recurso en línea (XX, 122 p.) : 95 ilustraciones, 76 ilustraciones en color.ISBN: 9783662488164.Subject: Nanotecnología | BiotecnologíaDDC classification: 620.5 Online resources: Acceso a este recurso digital (usuarios Universidad Europea de Madrid)
Abstract: This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem
| Item type | Current library | Collection | Call number | Copy number | Status | Date due | Barcode | Item holds | |
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Madrid Digital Acceso Electrónico (UEM) | Ciencias e Ingeniería | T174.7 Z436 2016 EB (Browse shelf(Opens below)) | .i11599509 | Acceso electrónico | eBOOK .i11599509 |
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| T174.7 R356 2016 EB 3rd International Conference on Nanotechnologies and Biomedical Engineering : ICNBME-2015, September 23-26, 2015, Chisinau, Republic of Moldova | T174.7 S675 2017 EB Springer handbook of nanotechnology | T174.7 S778 2016 EB Structure and Multiscale Mechanics of Carbon Nanomaterials | T174.7 Z436 2016 EB Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting | T175 2024 EB ABCM Series on Mechanical Sciences and Engineering : 12th Brazilian Manufacturing Engineering Congress - COBEF | T175.5 ES R&D Management | T185 .A383 2015 EB Advances in Production Technology |
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem
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