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Zhang, Xiao-Sheng

Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting by Xiao-Sheng Zhang - 1st ed. - Berlin, Heidelberg Springer Berlin Heidelberg 2016 - 1 recurso en línea (XX, 122 p.) 95 ilustraciones, 76 ilustraciones en color - Springer Theses, Recognizing Outstanding Ph.D. Research 2190-5053 . - Springer Theses, Recognizing Outstanding Ph.D. Research .

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem

ISBN: 9783662488164

Subjects--Topical Terms:
Nanotecnología
Biotecnología

LC Class. No.: T174.7 / Z436 2016 EB

Dewey Class. No.: 620.5