Micro and Nano Fabrication: Tools and Processes
Gatzen, Hans H
Micro and Nano Fabrication: Tools and Processes by Hans H. Gatzen, Volker Saile, Jürg Leuthold. - 1 recurso en línea (XXVI, 519 páginas 357 ilustraciones, 54 ilustraciones a color.) - Engineering (Springer-11647) .
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
9783662443958
10.1007/978-3-662-44395-8 doi
Microelectrónica
TK7875 / .G389 2015 EB
Micro and Nano Fabrication: Tools and Processes by Hans H. Gatzen, Volker Saile, Jürg Leuthold. - 1 recurso en línea (XXVI, 519 páginas 357 ilustraciones, 54 ilustraciones a color.) - Engineering (Springer-11647) .
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
9783662443958
10.1007/978-3-662-44395-8 doi
Microelectrónica
TK7875 / .G389 2015 EB