000			03868cam a2200421Ii 4500
001			95201
003			ES-MaUEC
005			20230102112652.0
006			m o d
007			cr cnu|||unuuu
008			170112t20172017sz a ob 001 0 eng d
020			_a3319286889 _q(electronic book)
020			_a9783319286884 _q(electronic book)
020			_z3319286862 _q(cloth)
020			_z9783319286860 _q(cloth)
035			_a(OCoLC)968211901 _z(OCoLC)973280964
040			_aN$T _cN$T _dGW5XE _dIDEBK _dN$T _dYDX _dEBLCP _dOCLCF _dUAB _dCOO _dWAU _dIOG _dMERER _dESU _dZ5A _dOCLCQ _dJBG _dIAD _dICW _dICN _dOTZ _dOCLCQ _dNJR _dUPM _dVT2 _dOCLCQ _dU3W _dES-MaUEC _bspa
050		4	_aTK7875 _b.P549 2017 EB
245	0	0	_aPiezoelectric MEMS resonators _cHarmeet Bhugra, Gianluca Piazza, editors.
264		1	_aCham, Switzerland _bSpringer Nature _c[2017]
264		4	_c2017
300			_a1 recurso en línea (424 páginas) _bilustraciones
336			_aTexto _btxt _2rdacontent
337			_aelectrónico _bc _2rdamedia
338			_arecurso electrónico _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	0		_aMicrosystems and nanosystems
500			_aSpringerLink _bSpringer Engineering eBooks 2017 English+International
504			_aIncluye referencias bibliográficas e índice
505	0		_aAIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication.
520	3		_a"This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ... and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers"--Provided by publisher.
650		7	_aElectrónica _2embne _0(OCoLC)fst01019745 _0 _9138690
700	1		_aBhugra, Harmeet, _eeditor literario
700	1		_aPiazza, Gianluca, _eeditor literario
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=http://link.springer.com/10.1007/978-3-319-28688-4 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
988			_aEBOOK, asignarmaterias, EBSPRINGER_2017B
998			_b02/2018 _dz _e- _zSI
999			_c95201 _d95201 _x1