000			02921nam a22004095i 4500
001			84977
003			ES-MaUEC
005			20230207040449.0
007			cr nn 008mamaa
008			151222s2016 gw | s |||| 0|eng d
020			_a9783319238531
040			_aES-MaUEC
050		4	_aTK7875 _b.N366 2016
082	0	4	_a620.5
245	1	0	_aNanopositioning Technologies : _bFundamentals and Applications _cedited by Changhai Ru, Xinyu Liu, Yu Sun
250			_a1st ed.
260			_aCham _bSpringer International Publishing _c2016
300			_a1 recurso en línea (VI, 409 páginas) _b279 ilustraciones, 203 ilustraciones en color
336			_aTexto _btxt _2rdacontent
337			_aelectrónico _bc _2rdamedia
338			_arecurso electrónico _bcr _2rdacarrier
505	0		_a1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
520	3		_aThis book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
710	2		_aSpringerLink (Online service) _0Local _9106996
942			_2lcc _cLE
988			_aEBOOK, asignarmaterias , EBSPRINGER
650	0	7	_aIngeniería _0 _2embne _9670301
650		7	_aNanotecnología _0comprobar BNE20011268513 _2embne _9158453
700	1		_aRu, Changhai. _eeditor literario _997604 _0Local
700	1		_aLiu, Xinyu _eeditor literario _0Local _997605
700	1		_aSun, Yu. _eeditor literario _997606 _0Local
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://link.springer.com/book/10.1007/978-3-319-23853-1 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
901			_ai9783319238531
907			_a.b12942558 _b10-10-17 _c21-11-16
998			_am _a_alco _a_vill _b - - _cm _dz _e- _feng _ggw _h0
945			_aTK7875 .N366 2016 EB _g1 _ieBOOK _j0 _lmae _o- _pEUR0.00 _q- _r- _sb _t15 _u0 _v0 _w0 _x0 _y.i11586874 _z06-04-17
999			_c84977 _d84977 _x1