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008			151028s2016 gw | s |||| 0|eng d
020			_a9783319203850
040			_aES-MaUEC
050		4	_aTK7874 _b.Y834 2016
082	0	4	_a621.3815
100	1		_aYu, Bei. _997058 _0Local
245	1	0	_aDesign for Manufacturability with Advanced Lithography _cby Bei Yu, David Z Pan
250			_a1st ed.
260			_aCham _bSpringer International Publishing _c2016
300			_a1 recurso en línea (XI, 164 p.) _b100 ilustraciones, 91 ilustraciones en color
336			_aTexto (visual) _btxt _2rdacontent
337			_aelectrónico _bc _2rdamedia
338			_arecurso electrónico _bcr _2rdacarrier
505	0		_aIntroduction -- Layout Decomposition for Triple Patterning -- Layout Decomposition for Other Patterning Techniques -- Standard Cell Compliance and Placement Co-Optimization -- Design for Manufacturability with E-Beam Lithography -- Conclusions and Future Works.-.
520			_aThis book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level, or physical manufacturing level, this book describes DFM solutions from a circuit design level, such that most of the critical problems can be formulated and solved through combinatorial algorithms. Enables readers to tackle the challenge of layout decompositions for different patterning techniques; Presents a coherent framework, including standard cell compliance and detailed placement, to enable Triple Patterning Lithography (TPL) friendly design; Includes coverage of the design for manufacturability with E-Beam lithography.
710	2		_aSpringerLink (Online service) _0Local _9106996
942			_2lcc _cLE
988	0	0	_aEBOOK, EBSPRINGER
650		7	_aMicroprocesadores _9141164 _0comprobar BNE19900994978 _2embne
650		7	_aElectrónica _0comprobar BNE19900963053 _2embne _9138690
650	0	7	_aIngeniería _vCongresos y asambleas _0LocalX _2embne _9670301
700	1		_aPan, David Z. _997059 _0Local
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://link.springer.com/book/10.1007/978-3-319-20385-0 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
901			_ai9783319203850
907			_a.b12939699 _b10-10-17 _c21-11-16
998			_am _a_alco _a_vill _b - - _cm _dz _e- _feng _ggw _h0
945			_aTK7874 .Y834 2016 EB _g1 _ieBOOK _j0 _lmae _o- _pEUR0.00 _q- _r- _sb _t15 _u0 _v0 _w0 _x0 _y.i11584166 _z06-04-17
999			_c84691 _d84691 _x1