000 01267cam a2200337 a 4500
001 38588
003 ES-MaUEC
005 20230102105256.0
008 950719s1996 nyua b 001 0 eng
020 _a0195105087
035 _aSirsi) i9780195105087
040 _aDLC
_cDLC
_dES-MaUEC
_dUEM
050 4 _aTK7871.85
_b.C36 1996
050 0 0 _aTK7871.85
_bC25 1996 1996
082 0 0 _a621.3815/2
100 1 _aCampbell, Stephen A.,
_d1954-
_0Local
_966351
245 1 4 _aThe science and engineering of microelectronic fabrication
_cStephen A. Campbell
260 _aNew York
_bOxford University Press
_ccop. 1996
300 _axv, 536 páginas
_bilustraciones
_c25 cm
336 _aTexto (visual)
_btxt
_2rdacontent
337 _asin mediación
_bn
_2rdamedia
338 _avolumen
_bnc
_2rdacarrier
490 0 _aOxford series in electrical engineering
504 _aBibliografía
942 _2lcc
_cM1S
988 _aOPTELE813, INTE302, OPTELE808A
650 7 _aSemiconductores
_0comprobar BNE19900979544
_2embne
_9140004
907 _a.b1044905x
_b10-11-17
_c05-01-12
998 _am
_a_vill
_b05-01-12
_cm
_da
_e-
_feng
_gnyu
_h4
945 _aTK7871.85 .C36
_b1996
_g1
_i9300572525
_j0
_lmcg
_nSTAFF. 45960
_o-
_pEUR64.17
_q-
_r-
_s-
_t1
_u14
_v0
_w0
_x0
_y.i10601089
_z05-01-12
999 _c38588
_d38588
_x1