000			03337nam a22004215i 4500
999			_c120336 _d120336
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007			cr nn nnnaamaa
008			200409s2020 gw a o |||| 0|eng d
020			_a9783030405601
024	7		_a10.1007/978-3-030-40560-1 _2doi
040			_aES-MaUEC _bspa _cES-MaUEC _dES-MaUEC
050		4	_aTK7875 _b2020 EB
100	1		_aHuff, Michael N. _eautor _4aut _4http://id.loc.gov/vocabulary/relators/aut _1http://viaf.org/viaf/622149106386368492811 _9675170
245	1	0	_aProcess Variations in Microsystems Manufacturing / _cMichael Huff
250			_aFirst edition
264		1	_aCham _bSpringer International Publishing : _bImprint: Springer _c2020
300			_a1 recurso en línea (XIX, 521 páginas) _b236 ilustraciones, 24 ilustraciones a color
336			_2rdacontent _aTexto _btxt
337			_2rdamedia _aelectrónico _bc
338			_2rdacarrier _arecurso electrónico _bcr
347			_aArchivo de texto _bPDF
490	0		_aMicrosystems and Nanosystems _x2198-0063
490	0		_aEngineering (Springer-11647)
505	0		_aIntroduction -- Overview of Microsystems Manufacturing -- Process Variations in Microsystems Processing Steps -- Microsystems Metrology Methods and Associated Errors -- Process Integration and Variations in Material Properties -- Device Parameter Variations in Microsystems Manufacturing -- Quality Assurance and Control Methods Used in Microsystems Manufacturing -- Design Methods for Handling Process Variations -- Future Methods for Improved Microsystems Manufacturing Process Variations.
520	3		_aThis book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations.
988			_aSpringer_Engineering_23062020
650		7	_aNanotecnología _2embne _9158453
650		7	_aMicroelectrónica _2embne _9138689
710	2		_aSpringerLink (Online service) _0http://id.loc.gov/authorities/names/no2005046756 _1http://viaf.org/viaf/148105729
776	0	8	_iPrinted edition: _z9783030405588
776	0	8	_iPrinted edition: _z9783030405595
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://doi.org/10.1007/978-3-030-40560-1 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
942			_2lcc _cLE
998			_b07/2020 _dz _eo _zSI