000			02679nam a22003735i 4500
988			_aSpringer_Engineering_2019
999			_c116835 _d116835 _x1
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003			ES-MaUEC
005			20230110040247.0
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007			cr nn nnnaamaa
008			190617s2019 si | s |||| 0|eng d
020			_a9789811065880
024	7		_a10.1007/978-981-10-6588-0 _2doi
040			_aES-MaUEC _bspa _cES-MaUEC _dES-MaUEC
050		4	_aT174.7 _b2019 EB
245	0	0	_aMicro and Nano Fabrication Technology _cedited by Jiwang Yan.
264		1	_aSingapore _bSpringer Singapore : _bImprint: Springer _c2019.
300			_a1 recurso en línea (XII, 958 páginas)
336			_2rdacontent _aTexto _btxt
337			_2rdamedia _aelectrónico _bc
338			_2rdacarrier _arecurso electrónico _bcr
347			_atext file _bPDF
490	0		_aMicro/Nano Technologies _x2522-5065 _v1
490	0		_aEngineering (Springer-11647)
505	0		_aMaterial Physics -- Pattern design and transformation: Lithography -- Process simulation -- Metalization -- Deposition -- Wet etching -- Dry etching -- Assembly and packaging -- Laser micro and nanofabrication -- Nanomachining.
520			_aThis volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/mat erial science, optics, physics, chemistry, and more.
650		7	_2embne _aNanotecnología _9158453
700	1		_aYan, Jiwang _eeditor _4edt _4http://id.loc.gov/vocabulary/relators/edt
773	0		_tSpringer Nature Living Reference
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://doi.org/10.1007/978-981-10-6588-0 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
942			_2lcc _cLE
998			_aSI _cm _dz _feng _ggw _h0 _b01/2020 _eIG _zSI