000			02909nam a22003735i 4500
988			_aSpringer_Engineering_2019
999			_c116834 _d116834 _x1
001			116834
003			ES-MaUEC
005			20230110040247.0
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007			cr nn nnnaamaa
008			190617s2019 si | s |||| 0|eng d
020			_a9789811027987
024	7		_a10.1007/978-981-10-2798-7 _2doi
040			_aES-MaUEC _bspa _cES-MaUEC _dES-MaUEC
050		4	_aTK7875 _b2019 EB
245	0	0	_aMicro Electro Mechanical Systems _cedited by Qing-An Huang.
264		1	_aSingapore _bSpringer Singapore : _bImprint: Springer _c2019.
300			_a1 recurso en línea
336			_2rdacontent _aTexto _btxt
337			_2rdamedia _aelectrónico _bc
338			_2rdacarrier _arecurso electrónico _bcr
347			_atext file _bPDF
490	0		_aMicro/Nano Technologies _x2522-5065 _v2
490	0		_aEngineering (Springer-11647)
505	0		_aDevice Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.
520			_aThis handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.
650		7	_2embne _aSistemas de telecomunicación _9158073
700	1		_aHuang, Qing-An _eeditor _4edt _4http://id.loc.gov/vocabulary/relators/edt
773	0		_tSpringer Nature Living Reference
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://doi.org/10.1007/978-981-10-2798-7 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
942			_2lcc _cLE
998			_aSI _cm _dz _feng _ggw _h0 _b01/2020 _eIG _zSI