000			02607nam a22003975i 4500
999			_c103331 _d103331 _x1
001			103331
003			DE-He213
005			20230102113125.0
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007			cr nn 008mamaa
008			150625s2015 gw | s |||| 0|eng d
020			_a9783662470237
024	7		_a10.1007/978-3-662-47023-7 _2doi
040			_bspa _dES-MaUEC
050		4	_aTK7875 _b2015 EB
100	1		_aSchomburg, Werner Karl. _eautor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _1http://viaf.org/viaf/37554665/
245	1	0	_aIntroduction to Microsystem Design _cby Werner Karl Schomburg.
250			_a2nd edition
264		1	_aBerlin, Heidelberg _bSpringer International Publishing _c2015
300			_a1 recurso en línea (XXIV, 374 páginas 380 ilustraciones, 332 ilustraciones a color.)
336			_2rdacontent _aTexto (visual) _btxt
337			_2rdamedia _aelectrónico _bc
338			_2rdacarrier _arecurso electrónico _bcr
490	0		_aRWTHedition, _x1865-0899
490	0		_aEngineering (Springer-11647)
505	0		_aScaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
520	3		_aThis book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.  .
988			_aEBSPRINGER_2018
650		7	_9138689 _aMicroelectrónica _2embne
776	0	8	_iEdición impresa: _z9783662470244
776	0	8	_iEdición impresa: _z9783662470220
776	0	8	_iEdición impresa: _z9783662507339
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://doi.org/10.1007/978-3-662-47023-7 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
942			_2lcc _cLE
998			_b03/2019 _dq _zSI