| 000 | 02399nam a22003255i 4500 | ||
|---|---|---|---|
| 001 | 103166 | ||
| 003 | DE-He213 | ||
| 005 | 20230102113118.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 150102s2015 gw | s |||| 0|eng d | ||
| 020 | _a9783662443958 | ||
| 024 | 7 |
_a10.1007/978-3-662-44395-8 _2doi |
|
| 050 | 4 |
_aTK7875 _b.G389 2015 EB |
|
| 040 |
_aES-MaUEC _bspa |
||
| 100 | 1 |
_aGatzen, Hans H _eautor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _1http://viaf.org/viaf/132145857816723020512/ |
|
| 245 | 1 | 0 |
_aMicro and Nano Fabrication: _bTools and Processes _cby Hans H. Gatzen, Volker Saile, Jürg Leuthold. |
| 264 | 1 |
_aBerlin, Heidelberg _bSpringer International Publishing _c2015 |
|
| 300 | _a1 recurso en línea (XXVI, 519 páginas 357 ilustraciones, 54 ilustraciones a color.) | ||
| 505 | 0 | _aIntroduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example. | |
| 520 | 3 | _aFor Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. | |
| 650 | 7 |
_9138689 _aMicroelectrónica _2embne |
|
| 700 | 1 |
_aSaile, Volker _eautor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _0http://id.loc.gov/authorities/names/nb2009001494 _1http://viaf.org/viaf/63544381/ |
|
| 700 | 1 |
_aLeuthold, Jürg _eautor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _1http://viaf.org/viaf/3327492/ |
|
| 776 | 0 | 8 |
_iEdición impresa: _z9783662443965 |
| 776 | 0 | 8 |
_iEdición impresa: _z9783662443941 |
| 776 | 0 | 8 |
_iEdición impresa: _z9783662508268 |
| 856 | 4 | 0 |
_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://doi.org/10.1007/978-3-662-44395-8 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid) |
| 490 | 0 | _aEngineering (Springer-11647) | |
| 998 |
_b03/2019 _dz _ef _feng _ggw _h0 |
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| 999 |
_c103166 _d103166 _x1 |
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