000			03129nam a22004091i 4500
710	2		_aSpringerLink (Online service) _0http://id.loc.gov/authorities/names/no2005046756 _1http://viaf.org/viaf/274647764/ _9106996
999			_c102242 _d102242 _x1
001			102242
003			ES-MaUEC
005			20230102113032.0
006			a|||| o|||| 00| 0
007			cr nn 008mamaa
008			180419s2018 si | o |||| 0|eng d
020			_a9789811059452
024	7		_a10.1007/978-981-10-5945-2 _2doi
040			_bspa _cES-MaUEC _dES-MaUEC
041	0		_aeng
050		4	_aTK7875 _b2018 EB
245	0	0	_aMicro Electro Mechanical Systems _cedited by Qing-An Huang
264		1	_aSingapore _bSpringer International Publishing _c2018
300			_a1 recurso en línea (1122 ilustraciones)
336			_2rdacontent _aTexto _btxt
337			_2rdamedia _aelectrónico _bc
338			_2rdacarrier _arecurso electrónico _bcr
347			_atext file _bPDF
490	0		_aMicro/Nano Technologies, _x2522-5065
490	0		_aEngineering (Springer-11647)
505	0		_aDevice Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.
520	3		_aThis handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.
988			_aEBSPRINGER_2018
650		7	_2embne _aSistemas de telecomunicación _9158073
700	1		_aHuang, Qing-An. _eeditor literario _4edt _4http://id.loc.gov/vocabulary/relators/edt _1http://viaf.org/viaf/42086913/
776	0	8	_iEdición impresa: _z9789811059445
776	0	8	_iEdición impresa: _z9789811059469
856	4	0	_uhttps://go.openathens.net/redirector/universidadeuropea.es?url=https://doi.org/10.1007/978-981-10-5945-2 _zAcceso a este recurso digital (usuarios Universidad Europea de Madrid)
942			_2lcc _cLE _n0
998			_b04/2020 _dz _eb _zSI