Introduction -- Example 1: Piezoresistive pressure sensor -- Example 2: Surface micromachined acceleration sensor -- Example 3: Pneumatically actuated microgrippers -- Example 4: Point-of-care system for detection of C-reactive protein -- Example 5: Smart skin -- Glossary -- References -- Index.

The book "Case Studies in Micromechatronics - From Systems to Processes" describes prominent example applications of micromechatronic systems along with their enabling fabrication technologies. The chosen examples represent five main fields of application: consumer electronics, mobility and navigation, handling technology and automation, laboratory diagnostics, and biomedical technology. The example systems are made from different materials, requiring a large variety of modern fabrication methods and design rules, which are also explained in detail. As a result, an inverted introduction - from prominent applications to base technologies - is provided. Example applications are selected to offer a broad overview of the development environment of micromechatronic systems, including established as well as cutting-edge microfabrication technologies. The content Introduction - Piezoresistive pressure sensors - Surface micromachined acceleration sensors - Mechanical microgrippers - Point-of-care diagnostic systems - Flexible and stretchable sensor arrays The target groups The text would be valuable for graduate and undergraduate students as well as for engineers in the field. The authors Prof. Dr. Stephanus Büttgenbach is a professor emeritus at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research are silicon micromachining, quartz technology, MEMS-CAD, microactuators, microsensors, lab-on-chip systems, and microreactors. Prof. Dr. Iordania Constantinou is a junior professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her fields of research include amorphous semiconductors, organic electronics, micro- and nanosensors, and microfluidics. Prof. Dr. Andreas Dietzel is a professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research include systems in foil, laser microstructuring, point-of-care systems, MagMEMS, MEMS simulation, and the design and fabrication of microfluidic systems with applications in life sciences. Dr.-Ing. Monika Leester-Schädel is an academic senior councilor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her special fields of work are micromechatronics, sensor systems for aerospace, and microactuators. .