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The science and engineering of microelectronic fabrication / Stephen A. Campbell

by Campbell, Stephen A, (1954-).

Material type: articlePrinted books Publisher: New York : Oxford University Press, cop. 1996Items
Location Call no. Status Vol info Loan type
Depósito C (Villaviciosa de Odón) TK7871.85 .C36 1996 available

The science and engineering of microelectronic fabrication / Stephen A. Campbell

by Campbell, Stephen A, (1954-).

Edition: 2nd ed.Material type: articlePrinted books Publisher: New York : Oxford University Press, 2001Items
Location Call no. Status Vol info Loan type
Depósito C (Villaviciosa de Odón) TK7871.85 .C36 2001 available

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