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Campbell, Stephen A., 1954-

The science and engineering of microelectronic fabrication Stephen A. Campbell - 2nd ed. - New York Oxford University Press 2001 - 603 páginas ilustraciones 24 cm - The Oxford series in electrical and computer engineering .

Includes bibliographical references and index

ISBN: 0195136055

Subjects--Topical Terms:
Semiconductores

LC Class. No.: TK7871.85 / .C36 2001

Dewey Class. No.: 621.3815/2