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Campbell, Stephen A., 1954-

The science and engineering of microelectronic fabrication Stephen A. Campbell - New York Oxford University Press cop. 1996 - xv, 536 páginas ilustraciones 25 cm - Oxford series in electrical engineering .

Bibliografía

ISBN: 0195105087

Subjects--Topical Terms:
Semiconductores

LC Class. No.: TK7871.85 / .C36 1996 TK7871.85 / C25 1996 1996

Dewey Class. No.: 621.3815/2