Micro and Nano Machined Electrometers

Micro and Nano Machined Electrometers edited by Yong Zhu. - First edition 2020. - 1 recurso en línea (V, 220 páginas) 141 ilustraciones, 124 ilustraciones a color - Engineering (Springer-11647) .

Introduction -- Noises in electrometers -- Commercial solid-state electrometer -- Mesoscopic SET electrometer -- NEMS based resonant electrometer -- MEMS based resonant electrometer -- MEMS based resonant electrometer -- Vibrating-reed electrometer -- Vibrating-reed electrometer -- Electrometer applications.

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

9789811332470

10.1007/978-981-13-3247-0 doi


Medidas eléctricas--Aparatos e instrumentos

QC544.E4 / 2020 EB